Wafer Bow Measurement System
The Solar Cell Wafer Bow Measurement System uses 3D measurement techniques for quality control of wafer bowing.
The system is a standard instrument and easy to interface to any production line system.
The system is built on Scorpion Vision SoftwareŽ for user friendliness, configurability, reliability, flexibility and ease of maintenance.
Off-the-shelf world class hardware components including area- and line-scan camera technology are used.
Wafer bow measurements
- Minimum position – x,y,z [mm] (maximum deviation from fitted plane)
- Maximum position – x,y,z [mm] (minimum deviation from fitted plane)
- Bow – [mm]
(equals Zmax – Zmin)
- Bow distance [mm]
- 2D distance between min and max position
- Bow direction [degrees]
- Average height of object – [mm]
- Number of valid points in 3D model
- Quality - % of valid points
More details in
pdf.
Read also the article
Scanning the Bow in Vision Systems
Design.
|
