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Wafer Bow Measurement System

The Solar Cell Wafer Bow Measurement System uses 3D measurement techniques for quality control of wafer bowing.

 

The system is a standard instrument and easy to interface to any production line system. The system is built on Scorpion Vision SoftwareŽ for user friendliness, configurability, reliability, flexibility and ease of maintenance. Off-the-shelf world class hardware components including area- and line-scan camera technology are used.

 

Wafer bow measurements

  • Minimum position – x,y,z [mm] (maximum deviation from fitted plane)
  • Maximum position – x,y,z [mm] (minimum deviation from fitted plane)
  • Bow – [mm] (equals Zmax – Zmin)
  • Bow distance [mm]
  • 2D distance between min and max position
  • Bow direction [degrees]
  • Average height of object – [mm]
  • Number of valid points in 3D model
  • Quality - % of valid points

 

More details in pdf.

 

Read also the article Scanning the Bow in Vision Systems Design.

 

 

 

 

 

 

 

 

 

 

 

 

Tordivel Solar AS | Storgata 20 N-0184 Oslo Norway | Phone +47 2315 8700 | Fax +47 2315 8701

FNR: NO 992 641 908 MVA | office@tordivelsolar.com | www.tordivelsolar.com