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Product Performance

Inspection Item	Minimum Detection Value	Accuracy (3σ )	Illustration	System image
Length, Width	50 μm	20 μm
Diagonal	50 μm	20 μm
Corner distance	140 μm	20 μm
Chamfer length	200 μm	40 μm
Rectangularity	0,1°	0,05°
Sawmark	Step >5μm	2 μm
V-shape break	160x40μm2 or 80x80μm2	20 μm
Chipping	120x20μm2 or 80x80μm2	0,001mm2
Pin hole	80x80 μm2	NA
Contamination	160x120μm2	NA
Warp / Bow	200 μm	90 μm

Tordivel Solar AS | Storgata 20 N-0184 Oslo Norway | Phone +47 2315 8700 | Fax +47 2315 8701

FNR: NO 992 641 908 MVA | office@tordivelsolar.com | www.tordivelsolar.com