Products
Tordivel Solar AS is a complete supplier of inline and offline inspection and measurement systems and components for wafer production.
Tordivel Solar adds value by inspecting ingots, blocks and
wafers for defects to provide measurement and classification
data. Tordivel Solar markets a complete range of measurement instruments, systems
and software for the two first process steps in photovoltaic
industry: 3D measurements of ingots and blocks and inline
wafer inspection. Our systems and products are backed by extensive
research in 3D Machine Vision.
Wafer inspection The scope is to check wafers for defects and providing measurement and sorting data. This with the highest reliability and accuracy, low maintenance cost and the best total cost of ownership.
An illustration of a Tordivel Solar wafer inspection line is seen below.
Click to see our video.
TOPOLOGY
THICKNESS LIFETIME MICROCRACK
SURFACE
RESISTIVITY
Our systems perform these wafer measurements:
• Sawmarks
• TTV – Thickness
• Size, Surface, Chipping Edge Detection
• Contamination
• Shiny patches
• Detection and Identification
• Microcrystal Detection
• Wafer bow
System Architecture
The Wafer Inspection Master is the key interface to classify wafers and to facilitate analysis. The solution uses a
world class unified integrated system software solution which includes the Global Configuration Management System (GCMS)
and a Global Recipe System (GRS).
Measurement Instruments
Topology, Surface, Micro Crack and Optional (i.e. Thickness,
Resistivity, Lifetime) instruments
Wafer Inspection Master
• Coordinates wafer measurements between instruments
• Tracks wafer in inspection cell with id
• Combines measurements from different instruments to provide reliable wafer sorting and geometric mapping of wafer defects
WIDB
Wafer Inspection Database, stores detailed wafer data and images in an open SQL Database
GRS
Global Recipe System
GCMS
Global Configuration Management System
PMS
Production Management System connected over OPC
Wafer Sorting
Production line module providing the master with wafer id and receiving wafer sorting data from master
All our solutions are based on Scorpion Vision SoftwareŽ and include flexible interfaces like TCP/IP, RS-232 and Profibus, OPC support, logging of the inspection results and statistics presentation.
The architecture including geomapping ensures seamless integration of complimentary inspection instruments.
Scorpion Vision SoftwareŽ is a registered
trademark of Tordivel AS.  |
